How is 13.5 nm EUV light made?
To generate extreme ultraviolet (EUV) light, a CO2 laser fires two separate laser pulses at a fast-moving drop of tin. This vaporizes the tin and creates EUV light. It does this up to 50,000 times per second.
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How is 13.5 nm EUV light made?
To generate extreme ultraviolet (EUV) light, a CO2 laser fires two separate laser pulses at a fast-moving drop of tin. This vaporizes the tin and creates EUV light. It does this up to 50,000 times per second.