Highly reliable photodiode for VUV detection
The S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, the S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm2.
Features
-Greatly improved sensitivity stability even after exposure to ArF (λ=193 nm) excimer laser.
-Windowless package
Photosensitive area: 10 × 10 mm
Number of elements: 1
Package: Ceramic
Cooling: Non-cooled
Reverse voltage (max.): 5 V
Spectral response range: 190 to 1000 nm
Peak sensitivity wavelength (typ.): 720 nm
Photosensitivity (typ.): 0.015 A/W
Dark current (max.): 1000 pA
Rise time (typ.): 9 μs
Terminal capacitance (typ.): 4000 pF Measurement condition Ta=25 ℃, Photosensitivity: λ=193 nm
